• 专利附录
  • 专利说明
  • 权利要求
  • 类似技术
  • 同族专利
  • 引用文献
  • 法律状态
  • 优先权
    • 专利摘要:
    The invention relates to a method and a device (1) for generating a plasma jet (2) under atmospheric pressure for the surface treatment of workpieces (18), with a feed line (8) for the plasma-capable medium (5), a device (3) for electrical excitation of the plasma-capable medium (5) by means of a between a cathode (19) and a nozzle (21) formed anode (20) periodically ignited arc (22). To achieve a highly effective plasma jet (2) even at relatively low temperatures of the plasma jet (2), a heating device (23) for preheating the plasma-capable medium (5) is arranged in front of the device (3) for the electrical excitation of the plasma-capable medium (5).
    公开号:AT514555A4
    申请号:T50527/2013
    申请日:2013-08-27
    公开日:2015-02-15
    发明作者:
    申请人:Fronius Int Gmbh；
    IPC主号:
    专利说明:

    The invention relates to a process for producing a plasma beam under atmospheric pressure for surface treatment of workpieces, wherein the plasma jet is generated by electrical excitation of a plasma-capable medium by means of a periodically ignited arc between a cathode and an anode formed as a nozzle, and the plasma jet through the nozzle in the direction of the treated Surface is addressed.
    Furthermore, the invention relates to an apparatus for generating a plasma jet under atmospheric pressure for surface treatment of workpieces, with a supply line for the plasmafähhige medium, means for electrically exciting the plasma-capable medium by means of a between a cathode and a nozzle formed as an anode periodically ignited arc ,
    A plasma is understood as meaning a gas which contains free charge carriers, which is why electro-conductive gases are also used. Depending on the pressure and temperature, plasmas can be used in a variety of ways, for example in gas discharge lamps, in material deposition, for analysis, but also for processing workpieces and for disinfecting objects, body parts or wounds. With regard to the pressure of the plasma gas, a distinction is made between low pressure plasmas, normal pressure plasmas. The subject invention is directed primarily to the generation of plasma jets at atmospheric pressure at relatively low temperature and is intended primarily for applications for treating surfaces of workpieces or the like. The treatment of surfaces of work pieces with plasmas in low-pressure chambers is already a well-established and well-known method which has been used industrially for many years. Low-pressure plasmas are characterized by good ability to crack and high efficiency. They are well suited for the treatment of small parts and also of bulk material. Disadvantages are, in addition to high investment costs, the required process time for pumping out the plasma chambers and the lacking possibility of so-called inline performance of the plasma treatment. Even the treatment of larger components quickly becomes uneconomic due to the large vacuum chambers required for low-pressure plasmas.
    For the time being, applications of atmospheric pressure plasmas have been confined to so-called thermal plasmas, which at plasma temperatures of a few 1000 ° C. have been used mainly for melting processes (such as welding, soldering, cutting, etc.). Recent developments now also allow the realization of so-called non-thermal atmospheric pressure plasmas, which also allow applications at low plasma temperatures of a few 10 ° C. to a few 100 ° C. Thus, new interesting fields of application for surface treatment by means of atmospheric pressure plasmas, such as cleaning and activating of materials or coating by plasma-plasmidization up to medical applications, such as disinfecting open wounds.
    To generate an atmospheric pressure plasma, a special gas is usually used (e.g., conditioned air, N2, helium, argon) which is brought into the plasma state in a plasma torch by supplying electrical energy. This plasma is blown via a nozzle onto the surface to be treated while the plasma torch is moved over the workpiece at a defined distance and speed. This results in interactions of the plasma with the ambient air (quenching, mixing of the air molecules by turbulent flows) and interactions with the surface to be treated. The most convincing advantage of this concept is the inline capability and the resulting easy integration of the process into existing production chains. Restrictions apply when handling bulk materials and small parts, unless they are sufficiently placed in front of the plasma torch. Also, the oxidizing effect of these plasmas is undesirable in some applications.
    The interaction of the plasma jet with the surface of the workpiece activates and / or cleans it. The cleaning effect is due inter alia to mechanical processes due to the bombardment of the surface with excited molecules, atoms and ions and also to chemical processes. The impurities on the surface react with the excited particles in the plasma to form gaseous reaction products, which are finally removed by the gas stream. Applications of this process are found in the microfine cleaning and removal of oils, fats, silicones, oxides, fibers or thin coatings. A targeted change of the surface structure (for example microstructuring) is also possible.
    The activating effect of the plasma is achieved by chemical surface reactions. Depending on the base material and the composition of the plasma, radical sites or chemically active groups (e.g., hydroxyl or carbo-boxyl groups) are generated on the surface. These cause a change in the surface energy and, subsequently, a change in the surface properties of the treated workpieces. Thus, e.g. specifically influence the wetting behavior of materials. An initially hydrophobic surface (such as polypropylene) may be rendered hydrophilic by the plasma activation. Both effects, the formation of chemically active groups and the change in the surface energy, can drastically improve the wetting behavior, the layer formation and the adhesion of coatings.
    Many applications of the processes just described are in the pretreatment of materials prior to bonding, soldering, welding, gluing, painting, printing and coating. The purification and activation of materials by means of atmospheric pressure plasma can replace chemical cleaning processes and the use of primers. The associated elimination of solvents or other chemicals makes plasma technology both economically and ecologically interesting.
    For example, EP 0 761 415 B9 relates to a method of increasing the wettability of the surface of workpieces using atmospheric pressure plasma, wherein the plasma is generated by a high frequency excited arc that does not exit the nozzle of the plasma torch.
    EP 1 922 908 B1 has disclosed a method for operating a steam plasma torch and a water vapor cutter, from which an optimized changeover from a transmitted mode to the non-transmitted mode results for an optimum processing result.
    AT 510 012 Bl describes a steam plasma torch with an induction heater for vaporizing water or other liquids as a plasma-capable medium. The steam plasma torch described therein can be used, for example, for cutting workpieces.
    A disadvantage of previous methods and devices for the generation of plasma jets is that high activation of the plasma also causes an increase in the plasma temperature, which is why specially activated plasmas, due to their temperature, are not suitable for all applications, for example surface pre-treatment of sensitive workpieces , are suitable.
    The object of the present invention is therefore to provide a method and a device for generating a plasma jet under atmospheric pressure for the surface treatment of workpieces or the like, by means of which a high degree of activation of the plasma is made possible even at relatively low temperatures of the plasma in order to also sensitize applications chen workpieces or even parts of the human or animali body to allow. Disadvantages of known methods and devices should be avoided or at least reduced.
    The object according to the invention is achieved in a methodological respect by the preheating of the plasma-capable medium by means of the arc in a heating device before the electrical stimulation. By separating the thermal excitation of the plasma-permeable medium from the usual electrical stimulation by means of the arc, independent adjustment of plasma power and plasma temperature can be achieved. By the additional preheating of the plasma-capable medium before the electrical excitation by means of the arc, high plasma power or plasma activation can also be achieved at low plasma temperatures (so-called cold plasmas). The core of the present invention is the preheating of the plasma-permeable medium, which influences both the process of plasma generation and the process of surface treatment of the plasma
    Workpieces or the like has. The aim in the production of a plasma for the surface treatment of workpieces or the like is the generation of as many chemically active species as possible. For the generation of chemically active species (e.g., radicals or ions), a certain amount of energy must be applied. By heating the plasma-capable media, a part of this energy is already provided by thermal means. The electrical energy necessary for the generation of the plasma is thereby reduced. This results in positive effects on the ignition behavior of the plasma and thus also gives more latitude to the geometry of the plasma torch. Also, some excess electrical energy may be used to generate additional chemically active species. The pretreatment of work pieces with atmospheric pressure plasmas relies to a large extent on chemical surface reactions. The interesting absorption and desorption processes are sometimes highly temperature dependent. For each application there is an ideal temperature range to increase the effect of the plasma pretreatment. At the same time, the plasma temperature should not become too high in order to be able to process thermally sensitive surfaces as well. The present invention serves to optimally adjust the plasma temperature selectively and separately from the activation of the plasma. By preheating the plasma-capable medium, it is thus possible to optimize the process temperatures independently of the plasma generation parameters and thereby increase the effect of surface pretreatment of the atmospheric pressure plasma. These include, for example, higher activation and cleaning effects, higher process speeds, lower sensitivity with regard to the sample spacing and the like. In addition, a new plasma chemistry can be provided by the possibility of vaporizing liquid plasma-capable media.
    Advantageously, the plasma-capable medium is preheated to a temperature of 5 ° C. to 300 ° C. and regulated to this temperature in accordance with the particular application. This temperature range of the plasma jet allows application to many materials, including parts of the human or animal body.
    The plasma-capable medium can be preheated inductively or by means of resistance heating elements or radiant heating elements.
    In an inductive heating, the heat transfer resistance can be limited or reduced.
    If the arc for the electrical excitation of the plasma-permeable medium is ignited periodically with a pulse duration of less than 20 ys, an optimal electrical excitation can be achieved. Due to the relatively short pulse duration, the resulting temperature of the plasma can be kept low. Depending on the requirement, the excitation frequency may be in the range between 10 kHz and 100 kHz, for example.
    The temperature of the plasma jet directed from the nozzle towards the surface to be treated is preferably controlled between 10 ° C to 500 ° C. By controlling the temperature it can be ensured that the surfaces to be treated are not overheated and that the workpiece or the like is not destroyed.
    The plasma-capable medium may be a gas, a mixture of different gases, a liquid, a mixture of different liquids, or else a mixture of one or more gases with one or more liquids. The used gases and / or liquids can be targeted to the intervening application and optimally adapted to the material of the workpiece to be treated.
    If one or more liquids are used as the plasma-resistant medium, this liquid is preferably vaporized before the electrical stimulation by means of the arc. The heating device for vaporizing the liquid plasma-capable medium can be formed, for example, by induction heating, as described in AT 510 012 B1.
    The liquid used as the plasma-capable medium can be mixed with a gas after evaporation. Thus, one or more liquids may be mixed after evaporation with one or more gases to achieve certain plasma properties for particular applications.
    The object according to the invention is also achieved by an abovementioned device for generating a plasma jet, wherein a heating device for preheating the plasma-capable medium is arranged upstream of the device for the electrical excitation of the plasma-capable medium. For the achievable advantages, reference is made to the above description of the method for generating a plasma jet.
    The heating device is preferably designed to preheat the plasma-capable medium to 5 ° C. to 300 ° C. and to regulate it to the respective temperature in accordance with the respective application.
    The heating device for preheating the plasma-capable medium can be formed by an induction heating device, a resistance heating element or a radiation heating element.
    The device for the electrical excitation of the plasma-capable medium may be formed by a generator for generating high-frequency current pulses having a duration of less than 20 ys.
    If a control device is provided for controlling the temperature of the plasma beam directed from the nozzle to the surface to be treated, between 10 ° C. and 500 ° C., the respective desired temperature of the plasma jet can be held securely within the respective target range.
    The supply line for the plasma-capable medium can be formed by at least one gas line and / or at least one liquid line.
    A chamber for mixing the preheated plasma-capable medium with another plasma-capable medium can be arranged between the heating device for preheating the plasma-capable medium and the device for electrically exciting the plasma-capable medium.
    The present invention will be explained in more detail with reference to the attached Zeichnun¬gen. Show:
    1 shows a schematic representation of an apparatus for generating a plasma jet;
    Fig. 2 shows the structure of an embodiment of a plasma torch in a sectional view; and
    Fig. 3 is a block diagram of an apparatus for generating a plasma jet.
    FIG. 1 shows a device 1 for generating a plasma beam 2. The device 1 comprises a device 3 for the electrical excitation of a plasma-capable medium 5 provided in a container 4. The device 3 for the electrical excitation of the plasma-capable medium 5 is connected to a control device 6. The plasma torch 7 is connected to the control device 6 via a supply line 8, so that the plasma torch 7 can be provided with the plasma-capable medium 5 arranged in the container 4. The supply of the plasma torch 6 with elec¬trischer energy from the device 3 via the lines 9 and 10th
    For cooling the plasma torch 7, it can be connected via a cooling circuit 11 at most with the interposition of a flow monitor 12 with its own liquid container 13 or demBehälter 4. When the plasma torch 7 is started up, the cooling circuit 11 can be started by the control device 6, and thus a cooling of the plasma torch 7 via the cooling circuit 11 can be achieved. To form the cooling circuit 11, the plasma burner 7 is connected via cooling lines 14, 15 to the liquid container 13 or the container 4. The cooling circuit 11 can also be formed directly via the liquid supply of the plasma torch 7 from the container 4 via the supply line 7, whereby only a single liquid supply to the plasma torch 7 is required.
    Furthermore, an input and / or display device 16 can be provided, via which the most varied parameters or operating modes of the device 1 can be set and displayed. The parameters set via the input and / or display device 16 are forwarded to the control device 6, which controls the individual components of the device 1 accordingly.
    The plasma burner 7 can have at least one operating element 17 via which the user of the control device 6 can inform the plasma burner 7 that a processing is to be carried out. Furthermore, default settings can be made at the input and / or output device 16, for example. Of course, further Bedienele¬mente be arranged on the plasma torch 7, on the one or more operating parameters of the device 1 can be adjusted by the plasma torch 7. For this purpose, these operating elements 17 can be connected directly to the control device 6 via lines or via a bus system. The operating element 17 can also include a display device, for example an LCD display, so that the user can be shown corresponding settings, parameters or information at the plasma torch 7.
    After actuation of the control element 17, the control device 6 activates the individual components required for the plasma processing method. For example, first a pump (not shown) and the device 3 are activated, whereby a supply of the plasma torch 7 with the plasma-dense medium 5 and electrical energy is introduced. By supplying the plasma torch 7 with the plasma-permeable medium 5 and electrical energy, in the plasma torch 7, the plasma-permeable medium 5 is converted into the plasma jet 2, which is used to treat the surface a workpiece 18 or derglei¬ can be used.
    Fig. 2 shows the structure of an embodiment of a Plasmabren¬ners 7 in a sectional view. Accordingly, the plasma burner 7 comprises at least one supply line 8 for the plasma-capable medium 5 (not shown), a cathode 19 and an anode 20 formed as a nozzle 21. Of course, cathode 19 and anode 20 can also be used vice versa. Between the cathode 19 and the anode 20, an arc 22 is ignited periodically, which electrically excites the plasma-permeable medium 5 supplied via the supply lines 8. According to the invention, a heating device 23 for preheating the plasma-resistant medium 5 is additionally arranged, which in the illustrated example is designed as an induction heater 24, which is arranged around the helically arranged line for the plasma-capable medium 5. In addition, a heating device for evaporating a liquid, plasma-capable medium 5 may be provided (not shown), after which at best a chamber 27 is provided for mixing a plurality of plasma-capable media 5. The mixture-plasma-capable media 5 is then directed into the combustion chamber 28, in which the arc 22 is periodically ignited, where the plasma jet 2 is generated and driven out of the nozzle 21 in the direction of the workpiece 18 or the like to be treated. The distance between cathode 19 and anode 20 is larger than conventional plasma torches 7. By special design of this distance, but also of the combustion chamber 28 between cathode 19 and anode 20 and design of the nozzle 21, the turbulence of the plasma-capable medium 5 and subsequently the width of the plasma jet 2 can be adjusted and adapted to the particular application become. Due to the greater distance between the cathode 19 and the anode 20, it is advantageous if the ignition of the arc 22 is ignited at a higher frequency, usually in the range between 10 kHz and 100 kHz. Since the arc 22 does not exit the nozzle 21, the plasma jet 2 can also be used to treat workpieces 18 of electrically non-conductive material, for example plastics up to biological tissues.
    Finally, FIG. 3 shows a block diagram of a device 1 for generating a plasma jet 2 according to the present patent application. The device 1 comprises the plasma torch 7 described in FIG. 2, one or more containers 4 for a gas medium or plasma-capable medium 5 and a device 3 for the electrical excitation of the plasma-capable medium 5 in the plasma torch 7. Advantageously, a regulation device 25 for controlling the temperature of the plasma jet 2 by measuring the temperature with a suitable temperature sensor 26 at a suitable location and depending on the measured temperature, the device 3 for the electrical excitation of the plasma-capable medium 5 or the leads 8 for the plasma-permeable medium 5 are influenced accordingly. The
    Temperature measurement of the plasma jet 2 can - as shown in Fig. 3 - indirectly in the range of the heater 23 or also directly in the region of the nozzle 21 (not shown). The temperatures of the plasma jet 2 necessary for certain surface treatments may be contained in corresponding tables or databases 29.
    With the present method and apparatus for producing a plasma jet 2 under atmospheric pressure surfaces of workpieces 18 or the like can be suitably treated even at low temperatures, and in particular surfaces of workpieces 18 before painting, before welding, before gluing or the like with the plasma beam 2 pretreated. By preheating the plasma-capable medium 5, a separate adjustment of the electrical and thermal excitation of the plasma can take place.
    Example: For the pretreatment of aluminum for a subsequent welding, gluing or painting application, it may be advantageous to condition the surface in such a way that the wettability and the adhesion of the aluminum surface are increased. A good way to measure changes in the surface is by contact angle measurement. Inter alia, this measurement can be used to analyze the surface tension of solids before and after treatment with atmospheric pressure plasma. Increasing the surface tension is always a very good indicator that wettability and adhesiveness have improved. The aluminum used in this example has a surface tension of 32 mN / m in the untreated state. If a surface treatment is now carried out with atmospheric pressure plasmas, the surface tension can be increased significantly.
    In this example, an atmospheric pressure plasma torch having an integrated induction heater 24 is used as the heater 23. The diameter of the outlet opening of the nozzle 21 can be varied in a range between 1 mm and 6 mm, the distance of the cathode 19 to the anode 20 is at least 1 cm and the inner diameter of the combustion chamber 28 is substantially 1 cm. The heating power of the induction heater 24 can be regulated steplessly from 0 W to 500 W. For temperature control, a temperature sensor 26 is provided in the region of the heating device 23. The plasma-capable medium 5 is supplied via a feed line 8 to the plasma burner 7 and can be heated in the heating device 23. Pressure and flow rate of the supplied plasma-capable medium 5 is regulated so that a flow in the range of 20 liters of gaseous plasma-capable medium 5 per minute is ensured in the combustion chamber 28. In order to be able to carry out the flow of the plasma-capable medium 5 into the combustion chamber 28 in a manner suitable for plasma generation, the inlet consists of a plurality of inlet openings, which are arranged such that a flow vortex can be generated in the combustion chamber 28. For plasma generation, positive high-voltage pulses with a frequency of 20 kHz and a maximum voltage amplitude of 20 kV are used. For the treatment of the Aluminium¬werkstückes the plasma torch with a defined distance of 3.5 mm and a defined speed of 50 cm / min is passed over the material surface.
    If, in a first experiment, recycled air is used as the plasma-permeable medium 5 without switching on the heating device 23, a conventional treatment with atmospheric-pressure plasma can be carried out. The surface tension of the aluminum can thereby be increased to 55 mN / m. By switching on the heater 23 and raising the temperature of the plasma-capable medium 5, this value can now be further increased. If the temperature of the air before plasma generation is regulated to a value of 200 ° C., then the surface tension of the aluminum can be increased to 65 mN / m. It gets even more interesting if you also change the plasma chemistry. By using water as the starting medium and suitable control of the heating device 23, it is possible to provide water vapor at a temperature of 200 ° C. as the plasma-capable medium 5. With an atmospheric pressure plasma generated from this medium, the surface tension of aluminum can now be increased to 72 mN / m. The stated numerical values serve only to clarify this exemplary application and are not intended to be restrictive.
    权利要求:
    Claims (19)
    [1]
    1. A method for generating a plasma jet (2) under Atmo¬sphärendruck for surface treatment of workpieces (18), where the plasma jet (2) by electrical excitation of a plasma-capable medium (5) by means of a between a cathode (19) and a The anode (20) of the periodically ignited arc (22) formed as a nozzle (21) is generated, and the plasma jet (2) is directed through the nozzle (21) in the direction of the surface to be treated, characterized in that the plasma-impermeable medium (5) is preheated in a heater (23) prior to electrical stimulation by means of the arc (22).
    [2]
    A method according to claim 1, characterized in that the plasma-capable medium (5) is preheated to a temperature of 5 ° C to 300 ° C.
    [3]
    3. The method according to claim 1 or 2, characterized in that the plasma-capable medium (5) is inductively preheated.
    [4]
    4. The method according to claim 1 or 2, characterized in that the plasma-capable medium (5) is preheated by Widerstandsheizelemen¬ten or radiant heating elements.
    [5]
    5. The method according to any one of claims 1 to 4, characterized gekenn¬zeichnet that the arc (22) for the electrical excitation of the plasma-capable medium (5) is ignited periodically with a pulse duration less than 20 ps.
    [6]
    6. The method according to any one of claims 1 to 5, characterized gekenn¬zeichnet that the temperature of the directed from the nozzle (21) in the direction of the surface to be treated plasma jet (2) between 10 ° C to 500 ° C is controlled.
    [7]
    7. The method according to any one of claims 1 to 6, characterized gekenn¬zeichnet that as plasma-capable medium (5), a gas is used.
    [8]
    8. The method according to any one of claims 1 to 7, characterized gekenn¬zeichnet that as a plasma-capable medium (5), a liquid is used.
    [9]
    A method according to claim 8, characterized in that the liquid used as the plasma-capable medium (5) is evaporated before the electrical stimulation by means of the arc (22).
    [10]
    A method according to claim 9, characterized in that the liquid used as the plasma-capable medium (5) is mixed with a gas after evaporation.
    [11]
    11. Device (1) for generating a plasma jet (2) under atmospheric pressure for surface treatment of workpieces (18), with a feed line (8) for the plasma-capable medium (5), a device (3) for electrical excitation of the plasma-capable medium (5 ) by means of an arc (22) which is periodically ignited between an anode (20) and a cathode (21), characterized in that before the device (3) for the electrical excitation of the plasma-capable medium (5) a heating device ( 23) for preheating the plasma-capable medium (5) is arranged.
    [12]
    12. Device (1) according to claim 11, characterized in that the heating device (23) for preheating the plasma-permeable medium (5) to 5 ° C to 300 ° C is formed.
    [13]
    13. Device (1) according to claim 11 or 12, characterized gekenn¬zeichnet that the heating device (23) for preheating the plas¬mafähigen medium (5) by an induction heater (24) is formed.
    [14]
    14. Device (1) according to claim 11 or 12, characterized gekenn¬zeichnet that the heating device (23) for preheating the plas¬mafähigen medium (5) by a resistance heating element or a radiant heating element is formed.
    [15]
    15. Device (1) according to one of claims 11 to 14, characterized in that the means (3) for electrical excitation of the plasma-capable medium (5) by a generator for generating high-frequency current pulses having a duration less than 20 ys is formed ,
    [16]
    16. Device (1) according to any one of claims 11 to 14, characterized in that a control device (25) for controlling the temperature of the nozzle (21) directed to the surface to be treated plasma jet (2) between 10 ° C and 500 ° C is provided.
    [17]
    17. Device (1) according to one of claims 11 to 16, characterized in that the supply line (8) for the plasma-capable medium (5) is formed by a gas line.
    [18]
    18. Device (1) according to one of claims 11 to 17, characterized in that the feed line (8) for the plasma-capable medium (5) is formed by a liquid line.
    [19]
    19. Device (1) according to one of claims 11 to 18, characterized in that between the heating device (23) for preheating the plasma-capable medium (5) and the device (3) for the electrical excitation of the plasma-capable medium (5) a chamber ( 27) for mixing the preheated plasma-capable medium (5) with a further plasma-capable medium (5) is arranged.
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    同族专利:
    公开号 | 公开日
    DE102014216505A1|2015-03-05|
    AT514555B1|2015-02-15|
    US9532440B2|2016-12-27|
    CN104427735B|2017-09-12|
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    引用文献:
    公开号 | 申请日 | 公开日 | 申请人 | 专利标题
    US20090200276A1|2006-09-15|2009-08-13|Fronius International Gmbh|Water-vapor plasma torch, and wear-detection and process-control method to be used with such a water-vapor plasma torch|
    DE102009015510A1|2009-04-02|2010-10-07|Reinhausen Plasma Gmbh|Method and beam generator for generating a collimated plasma jet|
    AT11556U1|2010-06-10|2010-12-15|Fronius Int Gmbh|METHOD AND DEVICE FOR CONTROLLING A PLASMA BURNER TO CLEAN SURFACES|
    DE2913464C3|1979-04-04|1983-11-10|Deutsche Forschungs- Und Versuchsanstalt Fuer Luft- Und Raumfahrt E.V., 5300 Bonn|DC plasma torch|
    US4482246A|1982-09-20|1984-11-13|Meyer Gerhard A|Inductively coupled plasma discharge in flowing non-argon gas at atmospheric pressure for spectrochemical analysis|
    US5319176A|1991-01-24|1994-06-07|Ritchie G. Studer|Plasma arc decomposition of hazardous wastes into vitrified solids and non-hazardous gasses|
    US5405514A|1993-07-28|1995-04-11|Gas Research Institute|Atmospheric pressure gas glow discharge|
    US5585147A|1994-06-28|1996-12-17|Matsushita Electric Works, Ltd.|Process for a surface treatment of a glass fabric|
    DE19532412C2|1995-09-01|1999-09-30|Agrodyn Hochspannungstechnik G|Device for surface pretreatment of workpieces|
    US5961772A|1997-01-23|1999-10-05|The Regents Of The University Of California|Atmospheric-pressure plasma jet|
    US6815700B2|1997-05-12|2004-11-09|Cymer, Inc.|Plasma focus light source with improved pulse power system|
    AT510012T|2001-03-15|2011-06-15|Univ Aix Marseille Ii|PREPARATION OF CALIBRATORS AND THEIR USE FOR THE QUANTIFICATION OF SPECIFIC NUCLEOTIDE SEQUENCES|
    AT413953B|2003-11-25|2006-07-15|Fronius Int Gmbh|METHOD AND CIRCUIT FOR TOUCH-FREE IGNITION OF A WELDING ARC|
    EP1689216A1|2005-02-04|2006-08-09|Vlaamse Instelling Voor Technologisch Onderzoek |Atmospheric-pressure plasma jet|
    AT501489B1|2005-02-25|2009-07-15|Fronius Int Gmbh|METHOD FOR CONTROLLING AND / OR REGULATING A WELDING DEVICE AND WELDING DEVICE|
    AT502422B1|2005-09-09|2007-06-15|Fronius Int Gmbh|METHOD FOR OPERATING A WATER STEAM PLASMA CYLINDER AND WATER VAPOR CUTTING DEVICE|
    CA2581806C|2006-03-08|2012-06-26|Tekna Plasma Systems Inc.|Plasma synthesis of nanopowders|
    AT510012B1|2010-12-29|2012-01-15|Fronius Int Gmbh|HEATING ELEMENT, WATER VAPOR CUTTING DEVICE AND BURNER OF A POWER GENERATING DEVICE|US9666415B2|2015-02-11|2017-05-30|Ford Global Technologies, Llc|Heated air plasma treatment|
    DE102016214146A1|2016-08-01|2018-02-01|Kjellberg Stiftung|plasma torch|
    CN107320847B|2017-06-21|2020-08-07|江苏春申堂药业有限公司|Low-temperature plasma sterilization pen|
    CN108321251B|2018-01-19|2019-11-08|河海大学常州校区|A kind of method that atmospheric pressure plasma discharge jet stream prepares black silicon|
    法律状态:
    优先权:
    申请号 | 申请日 | 专利标题
    ATA50527/2013A|AT514555B1|2013-08-27|2013-08-27|Method and device for generating a plasma jet|ATA50527/2013A| AT514555B1|2013-08-27|2013-08-27|Method and device for generating a plasma jet|
    DE102014216505.9A| DE102014216505A1|2013-08-27|2014-08-20|Method and device for generating a plasma jet|
    CN201410426246.5A| CN104427735B|2013-08-27|2014-08-26|Method and apparatus for producing plasma jet|
    US14/468,545| US9532440B2|2013-08-27|2014-08-26|Method and device for generating a plasma jet|
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